Showing results 1 to 1 of 1
Title | Author(s) | Issue Date | |
---|---|---|---|
Fabrication of thick silicon dioxide sacrificial and isolation blocks in a silicon substrate Journal:Journal of Micromechanics and Microengineering | 2002 |
Title | Author(s) | Issue Date | |
---|---|---|---|
Fabrication of thick silicon dioxide sacrificial and isolation blocks in a silicon substrate Journal:Journal of Micromechanics and Microengineering | 2002 |