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Title | Author(s) | Issue Date | Views | |
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Copper-encapsulated silicon micromachined structures Journal:Journal of Microelectromechanical Systems | 2000 | 184 |
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
Copper-encapsulated silicon micromachined structures Journal:Journal of Microelectromechanical Systems | 2000 | 184 |