Showing results 3 to 4 of 4
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Title | Author(s) | Issue Date | Views | |
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Optoelectronic packaging using silicon surface-micromachined alignment mirrors Journal:IEEE Photonics Technology Letters | 1995 | 201 | ||
Surface-micromachined mirrors for laser-beam positioning Journal:Sensors and Actuators, A: Physical | 1996 | 111 |