Showing results 2 to 3 of 3
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Title | Author(s) | Issue Date | Views | |
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Impact dynamics of micromachined bidirectional electrothermal vibromotors Journal:Journal of Applied Physics | 2004 | |||
Low voltage electrothermal vibromotor for silicon optical bench applications Journal:Sensors and Actuators, A: Physical | 2000 | 197 |