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Title | Author(s) | Issue Date | |
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Electrical discharge across micrometer-scale gaps for planar MEMS structures in air at atmospheric pressure Journal:Journal of Micromechanics and Microengineering | 2008 |
Title | Author(s) | Issue Date | |
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Electrical discharge across micrometer-scale gaps for planar MEMS structures in air at atmospheric pressure Journal:Journal of Micromechanics and Microengineering | 2008 |