Showing results 1 to 4 of 4
| Title | Author(s) | Issue Date | Views | |
|---|---|---|---|---|
Calculation of electrostatic forces and torques in MEMS using path-independent integrals Journal:Journal of Micromechanics and Microengineering | 2000 | |||
Collapse of microchannels during anodic bonding: Theory and experiments Journal:Journal of Applied Physics | 2004 | 193 | ||
Electrostatic model for an asymmetric combdrive Journal:Journal of Microelectromechanical Systems | 2000 | 66 | ||
Impact dynamics of micromachined bidirectional electrothermal vibromotors Journal:Journal of Applied Physics | 2004 |