Showing results 1 to 3 of 3
Title | Author(s) | Issue Date | |
---|---|---|---|
Electrothermally actuated bi-directional linear vibromotor Journal:Microscale Thermophysical Engineering | 1999 | ||
Impact dynamics of micromachined bidirectional electrothermal vibromotors Journal:Journal of Applied Physics | 2004 | ||
Low voltage electrothermal vibromotor for silicon optical bench applications Journal:Sensors and Actuators, A: Physical | 2000 |