Browsing "Department of Electrical & Electronic Engineering" by Author wei, h

Jump to: 0-9 A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
Showing results 1 to 2 of 2
TitleAuthor(s)Issue Date
 
Cascadic multigrid algorithm for robust inverse mask synthesis in optical lithography
Journal:Journal of Micro/Nanolithography, MEMS, and MOEMS
2014
 
2023