Showing results 1 to 3 of 3
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Cascadic multigrid algorithm for robust inverse mask synthesis in optical lithography Journal:Journal of Micro/Nanolithography, MEMS, and MOEMS | 2014 | ||
Level-set-based inverse lithography for mask synthesis using the conjugate gradient and an optimal time step Journal:Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics | 2013 | ||
Sparse nonlinear inverse imaging for shot count reduction in inverse lithography Journal:Optics Express | 2015 |