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Browsing "Department of Electrical & Electronic Engineering" by Author jia, n
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Showing results 1 to 9 of 9
Title
Author(s)
Issue Date
Machine learning for inverse lithography: Using stochastic gradient descent for robust photomask synthesis
Journal:
Journal of Optics A: Pure and Applied Optics
Jia, N
Lam, EY
2010
Performance analysis of pixelated source-mask optimization for optical microlithography
Proceeding/Conference:
2010 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2010
Jia, N
Lam, EY
2010
Pixelated source mask optimization for process robustness in optical lithography
Journal:
Optics Express
Jia, N
Lam, EY
2011
Regularization of inverse photomask synthesis to enhance manufacturability
Proceeding/Conference:
Proceedings of SPIE - The International Society for Optical Engineering
Jia, N
Wong, AK
Lam, EY
2009
A robust computational algorithm for inverse photomask synthesis in optical projection lithography
Journal:
SIAM Journal on Imaging Sciences
Choy, SK
Jia, N
Tong, CS
Tang, ML
Lam, EYM
2012
Robust level-set-based inverse lithography
Journal:
Optics Express
Shen, Y
Jia, N
Wong, N
Lam, EY
2011
Robust mask design with defocus variation using inverse synthesis
Proceeding/Conference:
Proceedings of SPIE
Jia, N
Wong, AK
Lam, EY
2008
Robustness enhancement in optical lithography: From pixelated mask optimization to pixelated source-mask optimization
Proceeding/Conference:
ECS Transactions
Jia, N
Lam, EY
2011
Stochastic gradient descent for robust inverse photomask synthesis in optical lithography
Proceeding/Conference:
Proceedings - International Conference on Image Processing, ICIP
Jia, N
Lam, EY
2010
