Showing results 1 to 2 of 2
| Title | Author(s) | Issue Date | Views | |
|---|---|---|---|---|
Ultra-fine nanofabrication by hybrid of energetic ion induced fluidization and stress Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2011 | |||
Ultrasensitive mass sensor using the out-of-phase vibration eigenstate of intercoupled dual-microcantilevers Proceeding/Conference:2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 | 2011 | 8 |