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Conference Paper: Fabrication of nanostructures with interferometric lithography

TitleFabrication of nanostructures with interferometric lithography
Authors
Burckel, D.Zhang, S.Brueck, S. R.J.
Issue Date2001
Citation
Conference on Lasers and Electro-Optics Europe - Technical Digest, 2001, p. 229 How to Cite?
DOI: http://dx.doi.org/10.1109/cleo.2001.947740
Persistent Identifierhttp://hdl.handle.net/10722/295062

 

DC FieldValueLanguage
dc.contributor.authorBurckel, D.-
dc.contributor.authorZhang, S.-
dc.contributor.authorBrueck, S. R.J.-
dc.date.accessioned2021-01-05T04:58:59Z-
dc.date.available2021-01-05T04:58:59Z-
dc.date.issued2001-
dc.identifier.citationConference on Lasers and Electro-Optics Europe - Technical Digest, 2001, p. 229-
dc.identifier.urihttp://hdl.handle.net/10722/295062-
dc.languageeng-
dc.relation.ispartofConference on Lasers and Electro-Optics Europe - Technical Digest-
dc.titleFabrication of nanostructures with interferometric lithography-
dc.typeConference_Paper-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1109/cleo.2001.947740-
dc.identifier.scopuseid_2-s2.0-0034805411-
dc.identifier.spage229-
dc.identifier.epage229-

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