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Conference Paper: A novel fabrication method of hollow nanoneedles applicable for single cell operation
| Title | A novel fabrication method of hollow nanoneedles applicable for single cell operation |
|---|---|
| Authors | |
| Keywords | Nanoneedle Fabrication Cell operation |
| Issue Date | 2010 |
| Citation | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), Groningen, The Netherlands, 3-7 October 2010. In Conference Proceedings, 2010, p. 1895-1897 How to Cite? |
| Abstract | In this work, a novel method, utilizing FIB (focused ion beam) nanomachining, PECVD refilling and wet-etching release processes, to fabricate the in-plane hollow nanoneedle, has been developed. A separate process was employed to verify and optimize the PECVD refilling process. A 170nm-wide hollow nanoneedle with a 14nm-wide nanochannel has been successfully fabricated. The nanoneedle has a good potential for single cell operation including delivery and extraction of biological components such as DNA, RNA, proteins and drugs. |
| Persistent Identifier | http://hdl.handle.net/10722/286884 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Zhang, Yushi | - |
| dc.contributor.author | Ji, Xu | - |
| dc.contributor.author | Li, Can | - |
| dc.contributor.author | Wu, Wengang | - |
| dc.contributor.author | Li, Zhihong | - |
| dc.date.accessioned | 2020-09-07T11:45:55Z | - |
| dc.date.available | 2020-09-07T11:45:55Z | - |
| dc.date.issued | 2010 | - |
| dc.identifier.citation | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), Groningen, The Netherlands, 3-7 October 2010. In Conference Proceedings, 2010, p. 1895-1897 | - |
| dc.identifier.uri | http://hdl.handle.net/10722/286884 | - |
| dc.description.abstract | In this work, a novel method, utilizing FIB (focused ion beam) nanomachining, PECVD refilling and wet-etching release processes, to fabricate the in-plane hollow nanoneedle, has been developed. A separate process was employed to verify and optimize the PECVD refilling process. A 170nm-wide hollow nanoneedle with a 14nm-wide nanochannel has been successfully fabricated. The nanoneedle has a good potential for single cell operation including delivery and extraction of biological components such as DNA, RNA, proteins and drugs. | - |
| dc.language | eng | - |
| dc.relation.ispartof | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010) | - |
| dc.subject | Nanoneedle | - |
| dc.subject | Fabrication | - |
| dc.subject | Cell operation | - |
| dc.title | A novel fabrication method of hollow nanoneedles applicable for single cell operation | - |
| dc.type | Conference_Paper | - |
| dc.description.nature | link_to_OA_fulltext | - |
| dc.identifier.scopus | eid_2-s2.0-84884310024 | - |
| dc.identifier.spage | 1895 | - |
| dc.identifier.epage | 1897 | - |