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- Publisher Website: 10.1109/HKEDM.1998.740208
- Scopus: eid_2-s2.0-0343726880
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Conference Paper: Spreading-Resistance Temperature Sensor on SOI
Title | Spreading-Resistance Temperature Sensor on SOI |
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Authors | |
Issue Date | 1998 |
Publisher | IEEE. |
Citation | IEEE Hong Kong Electron Devices Meeting Proceedings, Hong Kong, China, 29 August 1998, p. 148-151 How to Cite? |
Abstract | A Spreading-Resistance Temperature (SRT) sensor is fabricated on silicon-on-insulator (SOI) wafer and achieves characteristics comparable with similar SRT sensor on silicon wafer. This sensor structure can be potentially used in integrated sensors operating at temperatures up to 350 °C. |
Persistent Identifier | http://hdl.handle.net/10722/204166 |
ISBN |
DC Field | Value | Language |
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dc.contributor.author | Lai, PT | en_US |
dc.contributor.author | Li, B | en_US |
dc.contributor.author | Chan, CL | en_US |
dc.date.accessioned | 2014-09-19T20:07:44Z | - |
dc.date.available | 2014-09-19T20:07:44Z | - |
dc.date.issued | 1998 | en_US |
dc.identifier.citation | IEEE Hong Kong Electron Devices Meeting Proceedings, Hong Kong, China, 29 August 1998, p. 148-151 | en_US |
dc.identifier.isbn | 0780349326 | - |
dc.identifier.uri | http://hdl.handle.net/10722/204166 | - |
dc.description.abstract | A Spreading-Resistance Temperature (SRT) sensor is fabricated on silicon-on-insulator (SOI) wafer and achieves characteristics comparable with similar SRT sensor on silicon wafer. This sensor structure can be potentially used in integrated sensors operating at temperatures up to 350 °C. | - |
dc.language | eng | en_US |
dc.publisher | IEEE. | - |
dc.relation.ispartof | IEEE Hong Kong Electron Devices Meeting Proceedings | en_US |
dc.rights | ©1998 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. | - |
dc.title | Spreading-Resistance Temperature Sensor on SOI | en_US |
dc.type | Conference_Paper | en_US |
dc.identifier.email | Lai, PT: laip@eee.hku.hk | en_US |
dc.identifier.authority | Lai, PT=rp00130 | en_US |
dc.description.nature | published_or_final_version | - |
dc.identifier.doi | 10.1109/HKEDM.1998.740208 | - |
dc.identifier.scopus | eid_2-s2.0-0343726880 | - |
dc.identifier.hkuros | 240646 | en_US |
dc.identifier.spage | 148 | en_US |
dc.identifier.epage | 151 | en_US |
dc.publisher.place | United States | - |