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Title | Author(s) | Issue Date | Views | |
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Impact dynamics of micromachined bidirectional electrothermal vibromotors Journal:Journal of Applied Physics | 2004 | |||
Low voltage electrothermal vibromotor for silicon optical bench applications Journal:Sensors and Actuators, A: Physical | 2000 | 197 | ||
Modeling and characterization of micromachined bi-directional electro-thermal vibromotors Proceeding/Conference:American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS) | 2003 | 112 |