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Conference Paper: Fast Aerial Image Simulation of Partially Coherent Illumination System for Source Mask Optimization

TitleFast Aerial Image Simulation of Partially Coherent Illumination System for Source Mask Optimization
Authors
Wu, XLam, EYMLiu, S
Issue Date2013
PublisherThe Optical Society (OSA).
Citation
The 7th International Conference on Nanophotonics (ICNP) and the 3rd Conference on Advances in Optoelectronics and Micro/Nano Optics (AOM), Hong Kong, China, 19-23 May 2013, p. abstract no. P-NF009 How to Cite?
DescriptionPoster session
Persistent Identifierhttp://hdl.handle.net/10722/186796

 

DC FieldValueLanguage
dc.contributor.authorWu, Xen_US
dc.contributor.authorLam, EYMen_US
dc.contributor.authorLiu, Sen_US
dc.date.accessioned2013-08-20T12:19:32Z-
dc.date.available2013-08-20T12:19:32Z-
dc.date.issued2013en_US
dc.identifier.citationThe 7th International Conference on Nanophotonics (ICNP) and the 3rd Conference on Advances in Optoelectronics and Micro/Nano Optics (AOM), Hong Kong, China, 19-23 May 2013, p. abstract no. P-NF009en_US
dc.identifier.urihttp://hdl.handle.net/10722/186796-
dc.descriptionPoster session-
dc.languageengen_US
dc.publisherThe Optical Society (OSA).-
dc.relation.ispartofInternational COnference on Nanophotonics (ICNP) and Conference on Advances in Optoelectronics and Micro/Nano Optics (AOM)en_US
dc.titleFast Aerial Image Simulation of Partially Coherent Illumination System for Source Mask Optimizationen_US
dc.typeConference_Paperen_US
dc.identifier.emailLam, EYM: elam@eee.hku.hken_US
dc.identifier.authorityLam, EYM=rp00131en_US
dc.identifier.hkuros220502en_US
dc.identifier.spageabstract no. P-NF009-
dc.identifier.epageabstract no. P-NF009-
dc.publisher.placeUnited States-

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