Imaging system modeling and image synthesis for resolution enhancement in optical lithography
Grant Data
Project Title
Imaging system modeling and image synthesis for resolution enhancement in optical lithography
Principal Investigator
Professor Lam, Edmund Yin Mun
(Principal Investigator (PI))
Co-Investigator(s)
Dr Wong Alfred Kwok Kit
(Co-Investigator)
Duration
30
Start Date
2007-01-01
Amount
356000
Conference Title
Imaging system modeling and image synthesis for resolution enhancement in optical lithography
Presentation Title
Keywords
image synthesis, imaging system, optical lithography
Discipline
Signal and Image Processing,Electronics
HKU Project Code
HKU 7139/06E
Grant Type
General Research Fund (GRF)
Funding Year
2006
Status
Completed
All Publications
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Robust level-set-based inverse lithography Journal:Optics Express | 2011 | ||
| 2008 |