Showing results 1 to 2 of 2
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Optoelectronic packaging using silicon surface-micromachined alignment mirrors Journal:IEEE Photonics Technology Letters | 1995 | ||
Surface-micromachined mirrors for laser-beam positioning Proceeding/Conference:International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings | 1995 |