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| Title | Author(s) | Issue Date | |
|---|---|---|---|
Spatial modulation of nanopattern dimensions by combining interference lithography and grayscale-patterned secondary exposure Journal:Light: Science & Applications | 2022 |
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Spatial modulation of nanopattern dimensions by combining interference lithography and grayscale-patterned secondary exposure Journal:Light: Science & Applications | 2022 |