Browsing by Author Muller, RS

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TitleAuthor(s)Issue DateViews
 
Surface-micromachined mirrors for laser-beam positioning
Journal:Sensors and Actuators, A: Physical
1996
70
Surface-micromachined mirrors for laser-beam positioning
Proceeding/Conference:International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
1995
61