Showing results 4 to 6 of 6
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| Title | Author(s) | Issue Date | |
|---|---|---|---|
Optoelectronic packaging using silicon surface-micromachined alignment mirrors Journal:IEEE Photonics Technology Letters | 1995 | ||
Surface-micromachined mirrors for laser-beam positioning Proceeding/Conference:International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings | 1995 | ||
Surface-micromachined mirrors for laser-beam positioning Journal:Sensors and Actuators, A: Physical | 1996 |