Showing results 1 to 2 of 2
| Title | Author(s) | Issue Date | |
|---|---|---|---|
RTP formed oxynitride via direct nitridation in N 2 Proceeding/Conference:Proceedings of the IEEE Hong Kong Electron Devices Meeting | 2000 | ||
Ultrathin oxynitride formation by low energy ion-implantation Proceeding/Conference:Proceedings of International Conference on VLSI and CAD (ICVC) | 1999 |