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Title | Author(s) | Issue Date | |
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Cascadic multigrid algorithm for robust inverse mask synthesis in optical lithography Journal:Journal of Micro/Nanolithography, MEMS, and MOEMS | 2014 |
Title | Author(s) | Issue Date | |
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Cascadic multigrid algorithm for robust inverse mask synthesis in optical lithography Journal:Journal of Micro/Nanolithography, MEMS, and MOEMS | 2014 |