Showing results 1 to 2 of 2
Title | Author(s) | Issue Date | Views | |
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Permittivity of oxidized ultra-thin silicon films from atomistic simulations Journal:IEEE Electron Device Letters | 2015 | 50 | ||
Atomic level simulation of permittivity of oxidized ultra-thin Si channels Journal:Proceedings of International Conference on Simulation of Semiconductor Processes and Devices | 2015 | 44 |