Browsing by Author Rosenbluth, AE

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Showing results 1 to 2 of 2
TitleAuthor(s)Issue DateViews
 
Optimum mask and source patterns to print a given shape
Proceeding/Conference:Proceedings of SPIE
2001
142
 
Optimum mask and source patterns to print a given shape
Journal:Journal of Microlithography, Microfabrication, and Microsystems
2002
125