Showing results 6 to 7 of 7
< previous
Title | Author(s) | Issue Date | |
---|---|---|---|
Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator Journal:Journal of Microelectromechanical Systems | 1999 | ||
On-chip spiral inductors suspended over deep copper-lined cavities Journal:IEEE Transactions on Microwave Theory and Techniques | 2000 |