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Article: TEM study of electron beam-induced crystallization of amorphous GeSi films
Title | TEM study of electron beam-induced crystallization of amorphous GeSi films |
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Authors | |
Issue Date | 2004 |
Publisher | Taylor & Francis Ltd. The Journal's web site is located at http://www.tandf.co.uk/journals/titles/09500839.asp |
Citation | Philosophical Magazine Letters, 2004, v. 84 n. 11, p. 719-728 How to Cite? |
Abstract | Electron beam-induced crystallization of GeSi amorphous films with two different compositions, Ge0.7Si0.3 and Ge 0.1Si0.9, has been studied. The phase changes were examined by electron diffraction, high-resolution transmission electron microscopy and electron-diffraction simulation by the fast Fourier transformation method. A hexagonal structure induced by the electron irradiation was found in the Ge0.7Si0.3 film. In the Ge 0.1Si0.9 film, diamond cubic (dc) crystals and non-dc phases were formed by irradiation with low-density electron beams and high-density electron beams respectively. © 2004 Taylor & Francis Ltd. |
Persistent Identifier | http://hdl.handle.net/10722/76210 |
ISSN | 2023 Impact Factor: 1.2 2023 SCImago Journal Rankings: 0.344 |
ISI Accession Number ID | |
References |
DC Field | Value | Language |
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dc.contributor.author | Xu, ZW | en_HK |
dc.contributor.author | Ngan, AHW | en_HK |
dc.date.accessioned | 2010-09-06T07:18:42Z | - |
dc.date.available | 2010-09-06T07:18:42Z | - |
dc.date.issued | 2004 | en_HK |
dc.identifier.citation | Philosophical Magazine Letters, 2004, v. 84 n. 11, p. 719-728 | en_HK |
dc.identifier.issn | 0950-0839 | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/76210 | - |
dc.description.abstract | Electron beam-induced crystallization of GeSi amorphous films with two different compositions, Ge0.7Si0.3 and Ge 0.1Si0.9, has been studied. The phase changes were examined by electron diffraction, high-resolution transmission electron microscopy and electron-diffraction simulation by the fast Fourier transformation method. A hexagonal structure induced by the electron irradiation was found in the Ge0.7Si0.3 film. In the Ge 0.1Si0.9 film, diamond cubic (dc) crystals and non-dc phases were formed by irradiation with low-density electron beams and high-density electron beams respectively. © 2004 Taylor & Francis Ltd. | en_HK |
dc.language | eng | en_HK |
dc.publisher | Taylor & Francis Ltd. The Journal's web site is located at http://www.tandf.co.uk/journals/titles/09500839.asp | en_HK |
dc.relation.ispartof | Philosophical Magazine Letters | en_HK |
dc.title | TEM study of electron beam-induced crystallization of amorphous GeSi films | en_HK |
dc.type | Article | en_HK |
dc.identifier.openurl | http://library.hku.hk:4550/resserv?sid=HKU:IR&issn=0950-0839&volume=84&issue=11&spage=719&epage=728&date=2005&atitle=TEM+study+of+electron+beam-induced+crystallization+of+amorphous+GeSi+films | en_HK |
dc.identifier.email | Ngan, AHW:hwngan@hkucc.hku.hk | en_HK |
dc.identifier.authority | Ngan, AHW=rp00225 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1080/14786430500038088 | en_HK |
dc.identifier.scopus | eid_2-s2.0-17044371872 | en_HK |
dc.identifier.hkuros | 97775 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-17044371872&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 84 | en_HK |
dc.identifier.issue | 11 | en_HK |
dc.identifier.spage | 719 | en_HK |
dc.identifier.epage | 728 | en_HK |
dc.identifier.isi | WOS:000228432300007 | - |
dc.publisher.place | United Kingdom | en_HK |
dc.identifier.scopusauthorid | Xu, ZW=7405428896 | en_HK |
dc.identifier.scopusauthorid | Ngan, AHW=7006827202 | en_HK |
dc.identifier.citeulike | 160410 | - |
dc.identifier.issnl | 0950-0839 | - |