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Article: Monolithic integrated spreading-resistance silicon flow sensor
Title | Monolithic integrated spreading-resistance silicon flow sensor |
---|---|
Authors | |
Keywords | Flow sensors Monolithic integration Silicon Spreading-resistance Temperature-sensing elements |
Issue Date | 1997 |
Publisher | Elsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/sna |
Citation | Sensors And Actuators, A: Physical, 1997, v. 58 n. 1, p. 85-88 How to Cite? |
Abstract | A simple integrated flow sensor, with silicon spreading-resistance (SR) as the temperature-sensing element, has been designed and fabricated by a standard IC process. The operation of this spreading-resistance silicon flow (SRSF) sensor is based on the transfer of heat from a heated chip to a flowing fluid. The temperature difference on the chip is a measure of the flow velocity. Measurements are given for velocities up to about 4 m s-1 for air at room temperature, and higher sensor output is obtained for a higher temperature difference between the chip and flow. The SRSF sensor shows good prospects in applications involving velocity and direction sensitivities, and has great potential for flows of temperature higher than the intrinsic temperature of silicon ( ≈ 150°C) because the SR can sense higher temperature than conventional device structures. |
Persistent Identifier | http://hdl.handle.net/10722/73722 |
ISSN | 2023 Impact Factor: 4.1 2023 SCImago Journal Rankings: 0.788 |
ISI Accession Number ID | |
References |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lai, PT | en_HK |
dc.contributor.author | Liu, B | en_HK |
dc.contributor.author | Zheng, X | en_HK |
dc.contributor.author | Li, B | en_HK |
dc.contributor.author | Zhang, S | en_HK |
dc.contributor.author | Wu, Z | en_HK |
dc.date.accessioned | 2010-09-06T06:54:08Z | - |
dc.date.available | 2010-09-06T06:54:08Z | - |
dc.date.issued | 1997 | en_HK |
dc.identifier.citation | Sensors And Actuators, A: Physical, 1997, v. 58 n. 1, p. 85-88 | en_HK |
dc.identifier.issn | 0924-4247 | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/73722 | - |
dc.description.abstract | A simple integrated flow sensor, with silicon spreading-resistance (SR) as the temperature-sensing element, has been designed and fabricated by a standard IC process. The operation of this spreading-resistance silicon flow (SRSF) sensor is based on the transfer of heat from a heated chip to a flowing fluid. The temperature difference on the chip is a measure of the flow velocity. Measurements are given for velocities up to about 4 m s-1 for air at room temperature, and higher sensor output is obtained for a higher temperature difference between the chip and flow. The SRSF sensor shows good prospects in applications involving velocity and direction sensitivities, and has great potential for flows of temperature higher than the intrinsic temperature of silicon ( ≈ 150°C) because the SR can sense higher temperature than conventional device structures. | en_HK |
dc.language | eng | en_HK |
dc.publisher | Elsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/sna | en_HK |
dc.relation.ispartof | Sensors and Actuators, A: Physical | en_HK |
dc.subject | Flow sensors | en_HK |
dc.subject | Monolithic integration | en_HK |
dc.subject | Silicon | en_HK |
dc.subject | Spreading-resistance | en_HK |
dc.subject | Temperature-sensing elements | en_HK |
dc.title | Monolithic integrated spreading-resistance silicon flow sensor | en_HK |
dc.type | Article | en_HK |
dc.identifier.openurl | http://library.hku.hk:4550/resserv?sid=HKU:IR&issn=0924-4247&volume=58&spage=85&epage=88&date=1997&atitle=Monolithic+integrated+spreading-resistance+silicon+flow+sensor | en_HK |
dc.identifier.email | Lai, PT:laip@eee.hku.hk | en_HK |
dc.identifier.authority | Lai, PT=rp00130 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.scopus | eid_2-s2.0-0030653835 | en_HK |
dc.identifier.hkuros | 26282 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-0030653835&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 58 | en_HK |
dc.identifier.issue | 1 | en_HK |
dc.identifier.spage | 85 | en_HK |
dc.identifier.epage | 88 | en_HK |
dc.identifier.isi | WOS:A1997XJ53200011 | - |
dc.publisher.place | Switzerland | en_HK |
dc.identifier.scopusauthorid | Lai, PT=7202946460 | en_HK |
dc.identifier.scopusauthorid | Liu, B=7408690364 | en_HK |
dc.identifier.scopusauthorid | Zheng, X=7404091424 | en_HK |
dc.identifier.scopusauthorid | Li, B=26643217800 | en_HK |
dc.identifier.scopusauthorid | Zhang, S=7409376161 | en_HK |
dc.identifier.scopusauthorid | Wu, Z=7501411463 | en_HK |
dc.identifier.issnl | 0924-4247 | - |