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- Publisher Website: 10.1016/j.mejo.2008.07.037
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Article: Deep-level defects study of arsenic-implanted ZnO single crystal
Title | Deep-level defects study of arsenic-implanted ZnO single crystal |
---|---|
Authors | |
Keywords | As-implantation P-type doping ZnO |
Issue Date | 2009 |
Publisher | Elsevier Ltd. The Journal's web site is located at http://www.elsevier.com/locate/mejo |
Citation | Microelectronics Journal, 2009, v. 40 n. 2, p. 286-288 How to Cite? |
Abstract | Unintentionally doped n-type zinc oxide (ZnO) single crystal was implanted by arsenic ions with fluence of 1014 cm-2 at room temperature followed by post-implantation annealing up to 900 °C. Rectifying property was not observed in the As-implanted or the post-implantation annealed samples. Au Schottky contact was fabricated on the samples with the H2O2 pre-treatment. Deep-level transient spectroscopy measurements were performed on the Schottky contacts to study the deep-level defects and their thermal evolution. © 2008 Elsevier Ltd. All rights reserved. |
Persistent Identifier | http://hdl.handle.net/10722/59624 |
ISSN | 2023 Impact Factor: 1.9 |
ISI Accession Number ID | |
References |
DC Field | Value | Language |
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dc.contributor.author | Zhu, CY | en_HK |
dc.contributor.author | Ling, CC | en_HK |
dc.contributor.author | Brauer, G | en_HK |
dc.contributor.author | Anwand, W | en_HK |
dc.contributor.author | Skorupa, W | en_HK |
dc.date.accessioned | 2010-05-31T03:54:01Z | - |
dc.date.available | 2010-05-31T03:54:01Z | - |
dc.date.issued | 2009 | en_HK |
dc.identifier.citation | Microelectronics Journal, 2009, v. 40 n. 2, p. 286-288 | en_HK |
dc.identifier.issn | 0026-2692 | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/59624 | - |
dc.description.abstract | Unintentionally doped n-type zinc oxide (ZnO) single crystal was implanted by arsenic ions with fluence of 1014 cm-2 at room temperature followed by post-implantation annealing up to 900 °C. Rectifying property was not observed in the As-implanted or the post-implantation annealed samples. Au Schottky contact was fabricated on the samples with the H2O2 pre-treatment. Deep-level transient spectroscopy measurements were performed on the Schottky contacts to study the deep-level defects and their thermal evolution. © 2008 Elsevier Ltd. All rights reserved. | en_HK |
dc.language | eng | en_HK |
dc.publisher | Elsevier Ltd. The Journal's web site is located at http://www.elsevier.com/locate/mejo | en_HK |
dc.relation.ispartof | Microelectronics Journal | en_HK |
dc.rights | Microelectronics Journal. Copyright © Elsevier Ltd. | en_HK |
dc.subject | As-implantation | en_HK |
dc.subject | P-type doping | en_HK |
dc.subject | ZnO | en_HK |
dc.title | Deep-level defects study of arsenic-implanted ZnO single crystal | en_HK |
dc.type | Article | en_HK |
dc.identifier.openurl | http://library.hku.hk:4550/resserv?sid=HKU:IR&issn=0959-8324&volume=40&spage=286&epage=288&date=2009&atitle=Deep-level+defects+study+of+arsenic-implanted+ZnO+single+crystal | en_HK |
dc.identifier.email | Ling, CC: ccling@hkucc.hku.hk | en_HK |
dc.identifier.authority | Ling, CC=rp00747 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1016/j.mejo.2008.07.037 | en_HK |
dc.identifier.scopus | eid_2-s2.0-58749097797 | en_HK |
dc.identifier.hkuros | 155275 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-58749097797&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 40 | en_HK |
dc.identifier.issue | 2 | en_HK |
dc.identifier.spage | 286 | en_HK |
dc.identifier.epage | 288 | en_HK |
dc.identifier.isi | WOS:000263695100025 | - |
dc.identifier.scopusauthorid | Zhu, CY=14007977600 | en_HK |
dc.identifier.scopusauthorid | Ling, CC=13310239300 | en_HK |
dc.identifier.scopusauthorid | Brauer, G=7101650540 | en_HK |
dc.identifier.scopusauthorid | Anwand, W=9432786300 | en_HK |
dc.identifier.scopusauthorid | Skorupa, W=7102608722 | en_HK |
dc.identifier.issnl | 0026-2692 | - |