Showing results 1 to 2 of 2
Title | Author(s) | Issue Date | |
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Deep subwavelength nanolithography using localized surface plasmon modes on planar silver mask Journal:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 2005 | ||
Sub-100 nm lithography using ultrashort wavelength of surface plasmons Journal:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 2004 |