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Title | Author(s) | Issue Date | |
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Fundamentals and improvements of diffusion barrier/copper adhesion for damascene process Proceeding/Conference:Advanced Metallization Conference (AMC) | 2001 |
Title | Author(s) | Issue Date | |
---|---|---|---|
Fundamentals and improvements of diffusion barrier/copper adhesion for damascene process Proceeding/Conference:Advanced Metallization Conference (AMC) | 2001 |