Showing results 1 to 2 of 2
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Fabrication of silica nanowire bunch arrays in SiO vapor generated by oxygen plasma etching of silicon Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2013 | ||
Fabrication of suspended periodic nanostructure by focused ion beam induced material migration and Rayleigh-Plateau instability Proceeding/Conference:Proceedings of the IEEE Conference on Nanotechnology | 2013 |