Showing results 1 to 2 of 2
Title | Author(s) | Issue Date | |
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Fabrication of silica nanowire bunch arrays in SiO vapor generated by oxygen plasma etching of silicon Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2013 | ||
Ultrasensitive mass sensor using the out-of-phase vibration eigenstate of intercoupled dual-microcantilevers Proceeding/Conference:2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 | 2011 |