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	Title	Author(s)	Issue Date
	Effects of chlorine on interfacial properties and reliability of SiO 2 grown on 6H-SiC Journal:Applied Physics A: Materials Science and Processing	Xu, JP Lai, PT Wu, HP Chan, CL	2005
	Interfacial properties and reliability of SiO 2 grown on 6H-SiC in dry O 2 plus trichloroethylene Journal:Microelectronics Reliability	Lai, PT Xu, JP Wu, HP Chan, CL	2004

Showing results 1 to 2 of 2