Showing results 1 to 1 of 1
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
Ultra-shallow n +p junction formed by PH 3 and AsH 3 plasma immersion ion implantation Journal:Microelectronics Reliability | 2002 | 195 |
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
Ultra-shallow n +p junction formed by PH 3 and AsH 3 plasma immersion ion implantation Journal:Microelectronics Reliability | 2002 | 195 |