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Title | Author(s) | Issue Date | Views | |
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Optimum mask and source patterns to print a given shape Journal:Journal of Microlithography, Microfabrication, and Microsystems | 2002 | 130 |
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
Optimum mask and source patterns to print a given shape Journal:Journal of Microlithography, Microfabrication, and Microsystems | 2002 | 130 |