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Browsing "Department of Electrical & Electronic Engineering" by Author bosman, michel
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Title
Author(s)
Issue Date
Study of preferential localized degradation and breakdown of HfO<inf>2</inf>/SiO<inf>x</inf> dielectric stacks at grain boundary sites of polycrystalline HfO<inf>2</inf> dielectrics
Journal:
Microelectronic Engineering
Shubhakar, Kalya
Pey, Kin Leong
Raghavan, Nagarajan
Kushvaha, Sunil Singh
Bosman, Michel
Wang, Zhongrui
O'Shea, Sean Joseph
2013