Ultrabroadband efficient intracavity XUV output coupler

Abstract

We report an efficient intracavity XUV output coupler based on an anti-reflection-coated grazing incidence plate (GIP). Conceptually, GIP is an extension of a Brewster plate, affording low loss of the circulating fundamental light and serving as a highly efficient, extremely broadband output coupler for XUV. Due to the grazing incidence geometry, the short wavelength reflectivity can be extended to the keV range. The first GIP realized shows parameters close to the design. We discuss both the limitations of the GIP in comparison with other XUV output couplers and the applicability of the GIP extension at longer wavelengths, down to the MIR. © 2011 Optical Society of America.