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Article: Optimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses

TitleOptimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses
Authors
Yang, Ying YingSüßmann, FrederikZherebtsov, SergeyPupeza, IoachimKaster, JanLehr, DennisFuchs, Hans JörgKley, Ernst BernhardFill, ErnstDuan, Xuan MingZhao, Zhen ShengKrausz, FerencStebbings, Sarah L.Kling, Matthias F.
Issue Date2011
Citation
Optics Express, 2011, v. 19, n. 3, p. 1954-1962 How to Cite?
DOI: http://dx.doi.org/10.1364/OE.19.001954
AbstractWe designed, fabricated and characterized a nano-periodical highly-efficient blazed grating for extreme-ultraviolet (XUV) radiation. The grating was optimized by the rigorous coupled-wave analysis method (RCWA) and milled into the top layer of a highly-reflective mirror for IR light. The XUV diffraction efficiency was determined to be around 20% in the range from 35.5 to 79.2 nm. The effects of the nanograting on the reflectivity of the IR light and non-linear effects introduced by the nanograting have been measured and are discussed. © 2011 Optical Society of America.
Persistent Identifierhttp://hdl.handle.net/10722/364811

 

DC FieldValueLanguage
dc.contributor.authorYang, Ying Ying-
dc.contributor.authorSüßmann, Frederik-
dc.contributor.authorZherebtsov, Sergey-
dc.contributor.authorPupeza, Ioachim-
dc.contributor.authorKaster, Jan-
dc.contributor.authorLehr, Dennis-
dc.contributor.authorFuchs, Hans Jörg-
dc.contributor.authorKley, Ernst Bernhard-
dc.contributor.authorFill, Ernst-
dc.contributor.authorDuan, Xuan Ming-
dc.contributor.authorZhao, Zhen Sheng-
dc.contributor.authorKrausz, Ferenc-
dc.contributor.authorStebbings, Sarah L.-
dc.contributor.authorKling, Matthias F.-
dc.date.accessioned2025-10-30T08:35:34Z-
dc.date.available2025-10-30T08:35:34Z-
dc.date.issued2011-
dc.identifier.citationOptics Express, 2011, v. 19, n. 3, p. 1954-1962-
dc.identifier.urihttp://hdl.handle.net/10722/364811-
dc.description.abstractWe designed, fabricated and characterized a nano-periodical highly-efficient blazed grating for extreme-ultraviolet (XUV) radiation. The grating was optimized by the rigorous coupled-wave analysis method (RCWA) and milled into the top layer of a highly-reflective mirror for IR light. The XUV diffraction efficiency was determined to be around 20% in the range from 35.5 to 79.2 nm. The effects of the nanograting on the reflectivity of the IR light and non-linear effects introduced by the nanograting have been measured and are discussed. © 2011 Optical Society of America.-
dc.languageeng-
dc.relation.ispartofOptics Express-
dc.titleOptimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1364/OE.19.001954-
dc.identifier.pmid21369011-
dc.identifier.scopuseid_2-s2.0-79851501548-
dc.identifier.volume19-
dc.identifier.issue3-
dc.identifier.spage1954-
dc.identifier.epage1962-
dc.identifier.eissn1094-4087-

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