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Article: Grain size and its distribution in NiTi thin films sputter-deposited on heated substrates
Title | Grain size and its distribution in NiTi thin films sputter-deposited on heated substrates |
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Authors | |
Keywords | Crystalline particle size NiTi thin film Substrate temperature |
Issue Date | 2004 |
Citation | Chinese Physics, 2004, v. 13, n. 8, p. 1315-1319 How to Cite? |
Abstract | Grain size and its distribution in NiTi thin films sputter-deposited on a heated substrate have been investigated using the small angle x-ray scattering technique. The crystalline particles have a small size and are distributed over a small range of sizes for the films grown at substrate temperatures 370 and 420° C. The results show that the sizes of crystalline particles are about the same. From the x-ray diffraction profiles, the sizes of crystalline particles obtained were 2.40nm and 2.81nm at substrate temperatures of 350 and 420°C, respectively. The morphology of NiTi thin films deposited at different substrate temperatures has been studied by atomic force microscopy. The root mean square roughness calculated for the film deposited at ambient temperature and 420°C are 1.42 and 2.75nm, respectively. © 2004 Chin. Phys. Soc. and IOP Publishing Ltd. |
Persistent Identifier | http://hdl.handle.net/10722/335732 |
ISSN |
DC Field | Value | Language |
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dc.contributor.author | Li, Yong Hua | - |
dc.contributor.author | Meng, Fan Ling | - |
dc.contributor.author | Qiu, Deng Li | - |
dc.contributor.author | Wang, Yi | - |
dc.contributor.author | Zheng, Wei Tao | - |
dc.contributor.author | Wang, Yu Ming | - |
dc.date.accessioned | 2023-12-28T08:48:20Z | - |
dc.date.available | 2023-12-28T08:48:20Z | - |
dc.date.issued | 2004 | - |
dc.identifier.citation | Chinese Physics, 2004, v. 13, n. 8, p. 1315-1319 | - |
dc.identifier.issn | 1009-1963 | - |
dc.identifier.uri | http://hdl.handle.net/10722/335732 | - |
dc.description.abstract | Grain size and its distribution in NiTi thin films sputter-deposited on a heated substrate have been investigated using the small angle x-ray scattering technique. The crystalline particles have a small size and are distributed over a small range of sizes for the films grown at substrate temperatures 370 and 420° C. The results show that the sizes of crystalline particles are about the same. From the x-ray diffraction profiles, the sizes of crystalline particles obtained were 2.40nm and 2.81nm at substrate temperatures of 350 and 420°C, respectively. The morphology of NiTi thin films deposited at different substrate temperatures has been studied by atomic force microscopy. The root mean square roughness calculated for the film deposited at ambient temperature and 420°C are 1.42 and 2.75nm, respectively. © 2004 Chin. Phys. Soc. and IOP Publishing Ltd. | - |
dc.language | eng | - |
dc.relation.ispartof | Chinese Physics | - |
dc.subject | Crystalline particle size | - |
dc.subject | NiTi thin film | - |
dc.subject | Substrate temperature | - |
dc.title | Grain size and its distribution in NiTi thin films sputter-deposited on heated substrates | - |
dc.type | Article | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1088/1009-1963/13/8/023 | - |
dc.identifier.scopus | eid_2-s2.0-23344439662 | - |
dc.identifier.volume | 13 | - |
dc.identifier.issue | 8 | - |
dc.identifier.spage | 1315 | - |
dc.identifier.epage | 1319 | - |