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Article: Area-Selective Growth of Two-Dimensional Mono- And Bilayer WS2 for Field Effect Transistors

TitleArea-Selective Growth of Two-Dimensional Mono- And Bilayer WS<inf>2</inf> for Field Effect Transistors
Authors
Issue Date2023
Citation
ACS Materials Letters, 2023, v. 5, n. 6, p. 1760-1766 How to Cite?
AbstractHerein, we propose a novel approach for area-selective tunable growth of uniform monolayer or bilayer WS2 on dielectric substrates through in situ conversion of a predeposited W metal pad to WOx initially and then to WS2 mono- and bilayers. Compared with the various transfer methods that have been used previously for multilayer stacking, this direct-growth method has the advantages of producing cleaner interfaces and the capability of growing tunable layers on target substrates, thereby making it more suitable for manufacturing processes. The WS2 bilayer displayed uniform optical properties, with the atomic arrangement between layers having an AA stacking order that are supposed to have higher mobility. We adopted these WS2 monolayers and bilayers in field-effect transistors. Accordingly, this approach for highly area-selective growth of transition metal dichalcogenide monolayers and bilayers with metal pads and their in situ conversion appears to provide effective platforms for further device applications.
Persistent Identifierhttp://hdl.handle.net/10722/335453
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorHuang, Lin Yun-
dc.contributor.authorLi, Ming Yang-
dc.contributor.authorLiew, San Lin-
dc.contributor.authorLin, Shih Chu-
dc.contributor.authorChou, Ang Sheng-
dc.contributor.authorHsu, Ming Chun-
dc.contributor.authorHsu, Ching Hao-
dc.contributor.authorLin, Yu Tung-
dc.contributor.authorMao, Po Sen-
dc.contributor.authorHou, Duen Huei-
dc.contributor.authorLiu, Wei Cheng-
dc.contributor.authorWu, Chih I.-
dc.contributor.authorChang, Wen Hao-
dc.contributor.authorWang, Han-
dc.contributor.authorLi, Lain Jong-
dc.contributor.authorWei, Kung Hwa-
dc.date.accessioned2023-11-17T08:26:02Z-
dc.date.available2023-11-17T08:26:02Z-
dc.date.issued2023-
dc.identifier.citationACS Materials Letters, 2023, v. 5, n. 6, p. 1760-1766-
dc.identifier.urihttp://hdl.handle.net/10722/335453-
dc.description.abstractHerein, we propose a novel approach for area-selective tunable growth of uniform monolayer or bilayer WS2 on dielectric substrates through in situ conversion of a predeposited W metal pad to WOx initially and then to WS2 mono- and bilayers. Compared with the various transfer methods that have been used previously for multilayer stacking, this direct-growth method has the advantages of producing cleaner interfaces and the capability of growing tunable layers on target substrates, thereby making it more suitable for manufacturing processes. The WS2 bilayer displayed uniform optical properties, with the atomic arrangement between layers having an AA stacking order that are supposed to have higher mobility. We adopted these WS2 monolayers and bilayers in field-effect transistors. Accordingly, this approach for highly area-selective growth of transition metal dichalcogenide monolayers and bilayers with metal pads and their in situ conversion appears to provide effective platforms for further device applications.-
dc.languageeng-
dc.relation.ispartofACS Materials Letters-
dc.titleArea-Selective Growth of Two-Dimensional Mono- And Bilayer WS<inf>2</inf> for Field Effect Transistors-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1021/acsmaterialslett.3c00094-
dc.identifier.scopuseid_2-s2.0-85162893316-
dc.identifier.volume5-
dc.identifier.issue6-
dc.identifier.spage1760-
dc.identifier.epage1766-
dc.identifier.eissn2639-4979-
dc.identifier.isiWOS:001012186600001-

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