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- Publisher Website: 10.1002/1521-4095(20020205)14:3<191::AID-ADMA191>3.0.CO;2-7
- Scopus: eid_2-s2.0-0037022409
- WOS: WOS:000173839000002
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Article: A new scanning probe lithography scheme with a novel metal resist
Title | A new scanning probe lithography scheme with a novel metal resist |
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Authors | |
Issue Date | 2002 |
Citation | Advanced Materials, 2002, v. 14, n. 3, p. 191-194 How to Cite? |
Abstract | The scope of scanning probe lithography (SPL) as a technique for nanofabrication at the nanometer resolution level was discussed. The technique was used for patterning of silicon using Mo as a metal resist. Atomic force microscopy was used for image analysis due to its simplicity, lower requirements and ability for high-resolution real-space imaging. The use of water as chemical etchant made the process compatible with biological systems. The strategy can be used for nanoscale patterning of biological molecules. |
Persistent Identifier | http://hdl.handle.net/10722/334928 |
ISSN | 2023 Impact Factor: 27.4 2023 SCImago Journal Rankings: 9.191 |
ISI Accession Number ID |
DC Field | Value | Language |
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dc.contributor.author | Rolandi, M. | - |
dc.contributor.author | Quate, C. F. | - |
dc.contributor.author | Dai, H. | - |
dc.date.accessioned | 2023-10-20T06:51:47Z | - |
dc.date.available | 2023-10-20T06:51:47Z | - |
dc.date.issued | 2002 | - |
dc.identifier.citation | Advanced Materials, 2002, v. 14, n. 3, p. 191-194 | - |
dc.identifier.issn | 0935-9648 | - |
dc.identifier.uri | http://hdl.handle.net/10722/334928 | - |
dc.description.abstract | The scope of scanning probe lithography (SPL) as a technique for nanofabrication at the nanometer resolution level was discussed. The technique was used for patterning of silicon using Mo as a metal resist. Atomic force microscopy was used for image analysis due to its simplicity, lower requirements and ability for high-resolution real-space imaging. The use of water as chemical etchant made the process compatible with biological systems. The strategy can be used for nanoscale patterning of biological molecules. | - |
dc.language | eng | - |
dc.relation.ispartof | Advanced Materials | - |
dc.title | A new scanning probe lithography scheme with a novel metal resist | - |
dc.type | Article | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1002/1521-4095(20020205)14:3<191::AID-ADMA191>3.0.CO;2-7 | - |
dc.identifier.scopus | eid_2-s2.0-0037022409 | - |
dc.identifier.volume | 14 | - |
dc.identifier.issue | 3 | - |
dc.identifier.spage | 191 | - |
dc.identifier.epage | 194 | - |
dc.identifier.isi | WOS:000173839000002 | - |