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- Publisher Website: 10.1063/1.1464227
- Scopus: eid_2-s2.0-79956011133
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Article: Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy
| Title | Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy |
|---|---|
| Authors | |
| Issue Date | 2002 |
| Citation | Applied Physics Letters, 2002, v. 80, n. 12, p. 2225-2227 How to Cite? |
| Abstract | A methodology is developed to enable wafer scale fabrication of single-walled carbon nanotube (SWNT) tips for atomic force microscopy. Catalyst selectively placed onto 375 prefabricated Si tips on a wafer is made possible by a simple patterning technique. Chemical vapor deposition on the wafer scale leads to the growth of SWNTs protruding from more than 90% of the Si tips. This represents an important step towards the scale up of nanotube probe tips for advanced nanoscale imaging of solid-state and soft biological systems and for scanning probe lithography. © 2002 American Institute of Physics. |
| Persistent Identifier | http://hdl.handle.net/10722/334242 |
| ISSN | 2021 Impact Factor: 3.971 2020 SCImago Journal Rankings: 1.182 |
| ISI Accession Number ID |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yenilmez, Erhan | - |
| dc.contributor.author | Wang, Qian | - |
| dc.contributor.author | Chen, Robert J. | - |
| dc.contributor.author | Wang, Dunwei | - |
| dc.contributor.author | Dai, Hongjie | - |
| dc.date.accessioned | 2023-10-20T06:46:44Z | - |
| dc.date.available | 2023-10-20T06:46:44Z | - |
| dc.date.issued | 2002 | - |
| dc.identifier.citation | Applied Physics Letters, 2002, v. 80, n. 12, p. 2225-2227 | - |
| dc.identifier.issn | 0003-6951 | - |
| dc.identifier.uri | http://hdl.handle.net/10722/334242 | - |
| dc.description.abstract | A methodology is developed to enable wafer scale fabrication of single-walled carbon nanotube (SWNT) tips for atomic force microscopy. Catalyst selectively placed onto 375 prefabricated Si tips on a wafer is made possible by a simple patterning technique. Chemical vapor deposition on the wafer scale leads to the growth of SWNTs protruding from more than 90% of the Si tips. This represents an important step towards the scale up of nanotube probe tips for advanced nanoscale imaging of solid-state and soft biological systems and for scanning probe lithography. © 2002 American Institute of Physics. | - |
| dc.language | eng | - |
| dc.relation.ispartof | Applied Physics Letters | - |
| dc.title | Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy | - |
| dc.type | Article | - |
| dc.description.nature | link_to_subscribed_fulltext | - |
| dc.identifier.doi | 10.1063/1.1464227 | - |
| dc.identifier.scopus | eid_2-s2.0-79956011133 | - |
| dc.identifier.volume | 80 | - |
| dc.identifier.issue | 12 | - |
| dc.identifier.spage | 2225 | - |
| dc.identifier.epage | 2227 | - |
| dc.identifier.isi | WOS:000174498700061 | - |