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Article: Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology

TitleMonolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology
Authors
Issue Date2004
Citation
Nano Letters, 2004, v. 4, n. 1, p. 123-127 How to Cite?
AbstractAn integrated circuit combining single-walled carbon nanotube (SWNT) devices with n-channel metal oxide semiconductor (NMOS) field effect transistors was fabricated. SWNTs were grown, using chemical vapor deposition, from catalyst islands located on an NMOS decoder circuit. Massive arrays of nanotube devices, each addressed individually using the NMOS circuit, were rapidly characterized. The successful monolithic integration of nanotube devices and MOS transistors creates many possibilities, including electronically addressable nanotube chemical sensor arrays.
Persistent Identifierhttp://hdl.handle.net/10722/334088
ISSN
2023 Impact Factor: 9.6
2023 SCImago Journal Rankings: 3.411
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorTseng, Yu Chih-
dc.contributor.authorXuan, Peiqi-
dc.contributor.authorJavey, Ali-
dc.contributor.authorMalloy, Ryan-
dc.contributor.authorWang, Qian-
dc.contributor.authorBokor, Jeffrey-
dc.contributor.authorDai, Hongjie-
dc.date.accessioned2023-10-20T06:45:33Z-
dc.date.available2023-10-20T06:45:33Z-
dc.date.issued2004-
dc.identifier.citationNano Letters, 2004, v. 4, n. 1, p. 123-127-
dc.identifier.issn1530-6984-
dc.identifier.urihttp://hdl.handle.net/10722/334088-
dc.description.abstractAn integrated circuit combining single-walled carbon nanotube (SWNT) devices with n-channel metal oxide semiconductor (NMOS) field effect transistors was fabricated. SWNTs were grown, using chemical vapor deposition, from catalyst islands located on an NMOS decoder circuit. Massive arrays of nanotube devices, each addressed individually using the NMOS circuit, were rapidly characterized. The successful monolithic integration of nanotube devices and MOS transistors creates many possibilities, including electronically addressable nanotube chemical sensor arrays.-
dc.languageeng-
dc.relation.ispartofNano Letters-
dc.titleMonolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1021/nl0349707-
dc.identifier.scopuseid_2-s2.0-0842287323-
dc.identifier.volume4-
dc.identifier.issue1-
dc.identifier.spage123-
dc.identifier.epage127-
dc.identifier.isiWOS:000188233200024-

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