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Article: Continuous roller nanoimprinting: next generation lithography

TitleContinuous roller nanoimprinting: next generation lithography
Authors
Issue Date25-May-2023
PublisherRoyal Society of Chemistry
Citation
Nanoscale, 2023, v. 15, n. 27, p. 11403-11421 How to Cite?
Abstract

Nanoimprint lithography (NIL) is a cost-effective and high-throughput technique for replicating nanoscale structures that does not require expensive light sources for advanced photolithography equipment. NIL overcomes the limitations of light diffraction or beam scattering in traditional photolithography and is suitable for replicating nanoscale structures with high resolution. Roller nanoimprint lithography (R-NIL) is the most common NIL technique benefiting large-scale, continuous, and efficient industrial production. In the past two decades, a range of R-NIL equipment has emerged to meet the industrial needs for applications including biomedical devices, semiconductors, flexible electronics, optical films, and interface functional materials. R-NIL equipment has a simple and compact design, which allows multiple units to be clustered together for increased productivity. These units include transmission control, resist coating, resist curing, and imprinting. This critical review summarizes the hitherto R-NIL processes, their typical technical problems, and corresponding solutions and gives guidelines for developing advanced R-NIL equipment.


Persistent Identifierhttp://hdl.handle.net/10722/329099
ISSN
2023 Impact Factor: 5.8
2023 SCImago Journal Rankings: 1.416
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorPeng, Zhiting-
dc.contributor.authorZhang, Yage-
dc.contributor.authorChoi, Chin Long Ronald-
dc.contributor.authorZhang, Pengcheng-
dc.contributor.authorWu, Tianzhun-
dc.contributor.authorChan, Yau Kei-
dc.date.accessioned2023-08-05T07:55:17Z-
dc.date.available2023-08-05T07:55:17Z-
dc.date.issued2023-05-25-
dc.identifier.citationNanoscale, 2023, v. 15, n. 27, p. 11403-11421-
dc.identifier.issn2040-3364-
dc.identifier.urihttp://hdl.handle.net/10722/329099-
dc.description.abstract<p>Nanoimprint lithography (NIL) is a cost-effective and high-throughput technique for replicating nanoscale structures that does not require expensive light sources for advanced photolithography equipment. NIL overcomes the limitations of light diffraction or beam scattering in traditional photolithography and is suitable for replicating nanoscale structures with high resolution. Roller nanoimprint lithography (R-NIL) is the most common NIL technique benefiting large-scale, continuous, and efficient industrial production. In the past two decades, a range of R-NIL equipment has emerged to meet the industrial needs for applications including biomedical devices, semiconductors, flexible electronics, optical films, and interface functional materials. R-NIL equipment has a simple and compact design, which allows multiple units to be clustered together for increased productivity. These units include transmission control, resist coating, resist curing, and imprinting. This critical review summarizes the hitherto R-NIL processes, their typical technical problems, and corresponding solutions and gives guidelines for developing advanced R-NIL equipment.</p>-
dc.languageeng-
dc.publisherRoyal Society of Chemistry-
dc.relation.ispartofNanoscale-
dc.titleContinuous roller nanoimprinting: next generation lithography-
dc.typeArticle-
dc.identifier.doi10.1039/D2NR06380H-
dc.identifier.scopuseid_2-s2.0-85164624699-
dc.identifier.volume15-
dc.identifier.issue27-
dc.identifier.spage11403-
dc.identifier.epage11421-
dc.identifier.eissn2040-3372-
dc.identifier.isiWOS:001015558900001-
dc.identifier.issnl2040-3364-

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