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Conference Paper: A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process

TitleA wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process
Authors
Xu, WeiLijin, BeiqiDuan, MingzhengWang, XiaoyiWicaksana, JeffryMin, A.Ahmed, MoaazWang, RuijinFang, Nicholas XuanlaiBermak, AmineLee, Yi Kuen
Issue Date2018
Citation
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018, v. 2018-January, p. 824-827 How to Cite?
DOI: http://dx.doi.org/10.1109/MEMSYS.2018.8346682
AbstractIn this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.
Persistent Identifierhttp://hdl.handle.net/10722/318713
ISSN
1084-6999
2020 SCImago Journal Rankings: 0.249

 

DC FieldValueLanguage
dc.contributor.authorXu, Wei-
dc.contributor.authorLijin, Beiqi-
dc.contributor.authorDuan, Mingzheng-
dc.contributor.authorWang, Xiaoyi-
dc.contributor.authorWicaksana, Jeffry-
dc.contributor.authorMin, A.-
dc.contributor.authorAhmed, Moaaz-
dc.contributor.authorWang, Ruijin-
dc.contributor.authorFang, Nicholas Xuanlai-
dc.contributor.authorBermak, Amine-
dc.contributor.authorLee, Yi Kuen-
dc.date.accessioned2022-10-11T12:24:23Z-
dc.date.available2022-10-11T12:24:23Z-
dc.date.issued2018-
dc.identifier.citationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018, v. 2018-January, p. 824-827-
dc.identifier.issn1084-6999-
dc.identifier.urihttp://hdl.handle.net/10722/318713-
dc.description.abstractIn this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.-
dc.languageeng-
dc.relation.ispartofProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)-
dc.titleA wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process-
dc.typeConference_Paper-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1109/MEMSYS.2018.8346682-
dc.identifier.scopuseid_2-s2.0-85047012422-
dc.identifier.volume2018-January-
dc.identifier.spage824-
dc.identifier.epage827-

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