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Conference Paper: A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process

TitleA wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process
Authors
Issue Date2018
Citation
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018, v. 2018-January, p. 824-827 How to Cite?
AbstractIn this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.
Persistent Identifierhttp://hdl.handle.net/10722/318713
ISSN
2023 SCImago Journal Rankings: 0.322

 

DC FieldValueLanguage
dc.contributor.authorXu, Wei-
dc.contributor.authorLijin, Beiqi-
dc.contributor.authorDuan, Mingzheng-
dc.contributor.authorWang, Xiaoyi-
dc.contributor.authorWicaksana, Jeffry-
dc.contributor.authorMin, A.-
dc.contributor.authorAhmed, Moaaz-
dc.contributor.authorWang, Ruijin-
dc.contributor.authorFang, Nicholas Xuanlai-
dc.contributor.authorBermak, Amine-
dc.contributor.authorLee, Yi Kuen-
dc.date.accessioned2022-10-11T12:24:23Z-
dc.date.available2022-10-11T12:24:23Z-
dc.date.issued2018-
dc.identifier.citationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018, v. 2018-January, p. 824-827-
dc.identifier.issn1084-6999-
dc.identifier.urihttp://hdl.handle.net/10722/318713-
dc.description.abstractIn this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.-
dc.languageeng-
dc.relation.ispartofProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)-
dc.titleA wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process-
dc.typeConference_Paper-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1109/MEMSYS.2018.8346682-
dc.identifier.scopuseid_2-s2.0-85047012422-
dc.identifier.volume2018-January-
dc.identifier.spage824-
dc.identifier.epage827-

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