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Conference Paper: Optimal source beam shaping for digital holographic lithography

TitleOptimal source beam shaping for digital holographic lithography
Authors
Shusteff, M.Dudoff, J. K.Browar, A. E.M.Shaw, L. A.Panas, R. M.Hopkins, J. B.Fang, N. X.Spadaccini, C. M.
Issue Date2016
Citation
Optics InfoBase Conference Papers, 2016 How to Cite?
DOI: http://dx.doi.org/10.1364/DH.2016.DW1D.2
AbstractThe effects of illuminating beam profile (Gaussian, tophat) and fill-factor (underfill or overfill) on digital holographic image contrast and modulation transfer function are evaluated by numerical simulation and compared with experimental measurements.
Persistent Identifierhttp://hdl.handle.net/10722/318664

 

DC FieldValueLanguage
dc.contributor.authorShusteff, M.-
dc.contributor.authorDudoff, J. K.-
dc.contributor.authorBrowar, A. E.M.-
dc.contributor.authorShaw, L. A.-
dc.contributor.authorPanas, R. M.-
dc.contributor.authorHopkins, J. B.-
dc.contributor.authorFang, N. X.-
dc.contributor.authorSpadaccini, C. M.-
dc.date.accessioned2022-10-11T12:24:16Z-
dc.date.available2022-10-11T12:24:16Z-
dc.date.issued2016-
dc.identifier.citationOptics InfoBase Conference Papers, 2016-
dc.identifier.urihttp://hdl.handle.net/10722/318664-
dc.description.abstractThe effects of illuminating beam profile (Gaussian, tophat) and fill-factor (underfill or overfill) on digital holographic image contrast and modulation transfer function are evaluated by numerical simulation and compared with experimental measurements.-
dc.languageeng-
dc.relation.ispartofOptics InfoBase Conference Papers-
dc.titleOptimal source beam shaping for digital holographic lithography-
dc.typeConference_Paper-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1364/DH.2016.DW1D.2-
dc.identifier.scopuseid_2-s2.0-85019511668-

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