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Conference Paper: Force-calibrated AFM with rhombus-shaped cantilever for bending test of micro/nanoscale thin films

TitleForce-calibrated AFM with rhombus-shaped cantilever for bending test of micro/nanoscale thin films
Authors
Baek, Chang WookKim, Jong ManKim, Yong KweonLee, Hak JooKim, Jae HyunCho, Kiho
KeywordsAFM
Mechanical properties
Rhombus-shaped cantilever
Strip bending test
Thin films
Issue Date2005
Citation
13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, South Korea, 5-9 June 2005. In The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05, 2005, p. 2027-2030 How to Cite?
DOI: http://dx.doi.org/10.1109/SENSOR.2005.1497500
AbstractIn this paper, force-calibrated AFM device with a novel rhombus-shaped AFM cantilever has been demonstrated for bending test of micro/nanoscale thin films. The rhombus-shaped AFM cantilever is designed to be symmetric around the loading axis, and thus robust to the lateral movement that a conventional beam-shaped AFM cantilever may have. This new cantilever structure has been fabricated and assembled with the AFM to measure the mechanical properties of gold strip specimens. With appropriate calibration procedures, this system can improve the measurement accuracy of the strip bending test. © 2005 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/309286

 

DC FieldValueLanguage
dc.contributor.authorBaek, Chang Wook-
dc.contributor.authorKim, Jong Man-
dc.contributor.authorKim, Yong Kweon-
dc.contributor.authorLee, Hak Joo-
dc.contributor.authorKim, Jae Hyun-
dc.contributor.authorCho, Kiho-
dc.date.accessioned2021-12-15T03:59:54Z-
dc.date.available2021-12-15T03:59:54Z-
dc.date.issued2005-
dc.identifier.citation13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, South Korea, 5-9 June 2005. In The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05, 2005, p. 2027-2030-
dc.identifier.urihttp://hdl.handle.net/10722/309286-
dc.description.abstractIn this paper, force-calibrated AFM device with a novel rhombus-shaped AFM cantilever has been demonstrated for bending test of micro/nanoscale thin films. The rhombus-shaped AFM cantilever is designed to be symmetric around the loading axis, and thus robust to the lateral movement that a conventional beam-shaped AFM cantilever may have. This new cantilever structure has been fabricated and assembled with the AFM to measure the mechanical properties of gold strip specimens. With appropriate calibration procedures, this system can improve the measurement accuracy of the strip bending test. © 2005 IEEE.-
dc.languageeng-
dc.relation.ispartofThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.-
dc.subjectAFM-
dc.subjectMechanical properties-
dc.subjectRhombus-shaped cantilever-
dc.subjectStrip bending test-
dc.subjectThin films-
dc.titleForce-calibrated AFM with rhombus-shaped cantilever for bending test of micro/nanoscale thin films-
dc.typeConference_Paper-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1109/SENSOR.2005.1497500-
dc.identifier.scopuseid_2-s2.0-27544464340-
dc.identifier.spage2027-
dc.identifier.epage2030-

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