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Article: Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures

TitleSilicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures
Authors
Kim, J. M.Hyeon, I. J.Cho, K.Lee, H. J.Kim, Y. K.Chung, T. K.Kim, H. S.Baek, C. W.
Issue Date2008
Citation
Electronics Letters, 2008, v. 44, n. 4, p. 283-285 How to Cite?
DOI: http://dx.doi.org/10.1049/el:20083091
AbstractA novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing lateral motions of a conventional beam-shaped cantilever. © The Institution of Engineering and Technology 2008.
Persistent Identifierhttp://hdl.handle.net/10722/309185
ISSN
0013-5194
2022 Impact Factor: 1.1
2020 SCImago Journal Rankings: 0.375
ISI Accession Number ID
WOS:000253766600019

 

DC FieldValueLanguage
dc.contributor.authorKim, J. M.-
dc.contributor.authorHyeon, I. J.-
dc.contributor.authorCho, K.-
dc.contributor.authorLee, H. J.-
dc.contributor.authorKim, Y. K.-
dc.contributor.authorChung, T. K.-
dc.contributor.authorKim, H. S.-
dc.contributor.authorBaek, C. W.-
dc.date.accessioned2021-12-15T03:59:42Z-
dc.date.available2021-12-15T03:59:42Z-
dc.date.issued2008-
dc.identifier.citationElectronics Letters, 2008, v. 44, n. 4, p. 283-285-
dc.identifier.issn0013-5194-
dc.identifier.urihttp://hdl.handle.net/10722/309185-
dc.description.abstractA novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing lateral motions of a conventional beam-shaped cantilever. © The Institution of Engineering and Technology 2008.-
dc.languageeng-
dc.relation.ispartofElectronics Letters-
dc.titleSilicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1049/el:20083091-
dc.identifier.scopuseid_2-s2.0-39349088722-
dc.identifier.volume44-
dc.identifier.issue4-
dc.identifier.spage283-
dc.identifier.epage285-
dc.identifier.isiWOS:000253766600019-

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