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Article: Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures

TitleSilicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures
Authors
Issue Date2008
Citation
Electronics Letters, 2008, v. 44, n. 4, p. 283-285 How to Cite?
AbstractA novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing lateral motions of a conventional beam-shaped cantilever. © The Institution of Engineering and Technology 2008.
Persistent Identifierhttp://hdl.handle.net/10722/309185
ISSN
2021 Impact Factor: 1.202
2020 SCImago Journal Rankings: 0.375
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorKim, J. M.-
dc.contributor.authorHyeon, I. J.-
dc.contributor.authorCho, K.-
dc.contributor.authorLee, H. J.-
dc.contributor.authorKim, Y. K.-
dc.contributor.authorChung, T. K.-
dc.contributor.authorKim, H. S.-
dc.contributor.authorBaek, C. W.-
dc.date.accessioned2021-12-15T03:59:42Z-
dc.date.available2021-12-15T03:59:42Z-
dc.date.issued2008-
dc.identifier.citationElectronics Letters, 2008, v. 44, n. 4, p. 283-285-
dc.identifier.issn0013-5194-
dc.identifier.urihttp://hdl.handle.net/10722/309185-
dc.description.abstractA novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing lateral motions of a conventional beam-shaped cantilever. © The Institution of Engineering and Technology 2008.-
dc.languageeng-
dc.relation.ispartofElectronics Letters-
dc.titleSilicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1049/el:20083091-
dc.identifier.scopuseid_2-s2.0-39349088722-
dc.identifier.volume44-
dc.identifier.issue4-
dc.identifier.spage283-
dc.identifier.epage285-
dc.identifier.isiWOS:000253766600019-

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