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Conference Paper: Force-calibrated AFM for mechanical test of freestanding thin films

TitleForce-calibrated AFM for mechanical test of freestanding thin films
Authors
Lee, Hak JooCho, Ki HoKim, Jae HyunHan, Seung WooChoi, Byung IkBaek, Chang WookKim, Jong ManChoa, Sung Hoon
KeywordsAFM (Atomic Force Microscope)
Au
Calibration
Cantilever
Freestanding thin film
Mechanical test
Issue Date2005
Citation
Key Engineering Materials, 2005, v. 297-300, p. 275-279 How to Cite?
DOI: http://dx.doi.org/10.4028/www.scientific.net/KEM.297-300.275
AbstractAtomic force microscope (AFM) is a powerful tool for exploring a nano-scale world. It can measure a nano-scale surface topography with very high resolution and detect a very small force. In this paper, we propose a novel AFM cantilever and its calibration scheme to utilize AFM as a mechanical testing machine. We call this AFM with a new cantilever as a force-calibrated AFM. The feasibility of the AFM cantilever is validated through measurement of mechanical properties of freestanding Au thin films.
Persistent Identifierhttp://hdl.handle.net/10722/309182
ISSN
1013-9826
2023 SCImago Journal Rankings: 0.172

 

DC FieldValueLanguage
dc.contributor.authorLee, Hak Joo-
dc.contributor.authorCho, Ki Ho-
dc.contributor.authorKim, Jae Hyun-
dc.contributor.authorHan, Seung Woo-
dc.contributor.authorChoi, Byung Ik-
dc.contributor.authorBaek, Chang Wook-
dc.contributor.authorKim, Jong Man-
dc.contributor.authorChoa, Sung Hoon-
dc.date.accessioned2021-12-15T03:59:41Z-
dc.date.available2021-12-15T03:59:41Z-
dc.date.issued2005-
dc.identifier.citationKey Engineering Materials, 2005, v. 297-300, p. 275-279-
dc.identifier.issn1013-9826-
dc.identifier.urihttp://hdl.handle.net/10722/309182-
dc.description.abstractAtomic force microscope (AFM) is a powerful tool for exploring a nano-scale world. It can measure a nano-scale surface topography with very high resolution and detect a very small force. In this paper, we propose a novel AFM cantilever and its calibration scheme to utilize AFM as a mechanical testing machine. We call this AFM with a new cantilever as a force-calibrated AFM. The feasibility of the AFM cantilever is validated through measurement of mechanical properties of freestanding Au thin films.-
dc.languageeng-
dc.relation.ispartofKey Engineering Materials-
dc.subjectAFM (Atomic Force Microscope)-
dc.subjectAu-
dc.subjectCalibration-
dc.subjectCantilever-
dc.subjectFreestanding thin film-
dc.subjectMechanical test-
dc.titleForce-calibrated AFM for mechanical test of freestanding thin films-
dc.typeConference_Paper-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.4028/www.scientific.net/KEM.297-300.275-
dc.identifier.scopuseid_2-s2.0-33750122327-
dc.identifier.volume297-300-
dc.identifier.spage275-
dc.identifier.epage279-
dc.identifier.eissn1662-9795-

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